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Green Silicon Carbide Powder for Silicon Wafers Polishing

Green silicon carbide abrasives high purity, large crystalline silicon carbide raw materials, to ensure the excellent cutting performance and stable physical state of silicon carbide cutting micro powder.

TYPICAL CHEMICAL ANALYSIS
SiC≥99.05%
SiO2≤0.20%
F,Si≤0.03%
Fe2O3≤0.10%
F.C≤0.04%
TYPICAL PHISICAL PROPERTIES
Hardness:Mohs:9.5
Melting Point:Sublimes at 2600 ℃
Maximum service temperature:1900℃
Specific Gravity:3.20-3.25g/cm3
Bulk density(LPD):1.2-1.6 g/cm3
Color:Green
Particle shape:Hexagonal
Sizes:
Micropowder:

JIS:240# 280# 320# 360# 400# 500# 600# 700# 800# 1000# 1200# 1500# 2000# 2500# 3000# 4000# 6000# 8000# 10000#

FEPA: F230 F240 F320 F360 F400 F500 F600 F800 F1000 F1200 F1500 F2000

1. Excellent Polishing Performance

  • High hardness and sharp grain shape deliver superior surface finish on silicon wafers.
  • Effectively remove surface defects, scratches and uneven layers.

2. High Cutting Efficiency

  • Strong grinding capacity, which greatly improves polishing speed and production efficiency.
  • Stable abrasion performance with low consumption.

3. Uniform Particle Size

  • Narrow particle distribution ensures consistent polishing effect across all wafers.
  • Avoid over-polishing or local surface damage.

4. Good Chemical Stability

  • Resistant to high temperature and chemical corrosion in polishing slurry.
  • Low chemical reaction with silicon substrates, no contamination.

5. Low Surface Damage

  • Fine and regular grains cause minimal subsurface damage to silicon wafers.
  • Ideal for precision polishing of semiconductor-grade silicon wafers.

6. Cost-Effective

  • Long service life and stable quality, reduce overall production cost.
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